Effects of annealing on structural and TMR properties in rf-sputtered CoFeB/MgO/CoFeB magnetic tunnel junctions

  • Bae J.Y. (Department of material science & engineering , KAIST) ;
  • Kim D.J. (Department of material science & engineering , KAIST) ;
  • Lim W.C. (Department of material science & engineering , KAIST) ;
  • Lee T.D. (Department of material science & engineering , KAIST) ;
  • Kim K.W. (Device Lab., SAIT) ;
  • Kim T.W. (Device Lab., SAIT)
  • Published : 2006.06.01