Proceedings of the KAIS Fall Conference (한국산학기술학회:학술대회논문집)

The Korea Academia-Industrial cooperation Society (한국산학기술학회)
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Gassensing characteristics of carbon nanotube gas sensor using a diaphragm structure

다이아프램 구조를 이용한 탄소나노튜브 가스 센서의 가스감응특성

  • Kim, Sung-Woon (Dept of Electronic & Electrical & Computer, University of Seoul) ;
  • Han, Chun-Jae (Dept of Digital Broadcasting & Electronics Engineering, Chungwoon University) ;
  • Cho, Woo-Sung (Dept of Electronic Engineering, Korea University) ;
  • Ju, Byeong-Kwon (Dept of Electronic Engineering, Korea University) ;
  • Cho, Hyun-Seob (Dept of Digital Broadcasting & Electronics Engineering, Chungwoon University) ;
  • Kim, Young-Cho (Dept of Digital Broadcasting & Electronics Engineering, Chungwoon University)
  • 김성운 (서울시립대학교 전자전기컴퓨터공학부) ;
  • 한재천 (청운대학교 디지털 방송공학과) ;
  • 조우성 (고려대학교 전자공학과) ;
  • 주병권 (고려대학교 전자공학과) ;
  • 조현섭 (청운대학교 디지털 방송공학과) ;
  • 김영조 (청운대학교 디지털 방송공학과)
  • Published : 2006.05.25
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Abstract

The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and CNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature change to modify sensor operation. Gas sensor responses of CNT-film to $NO_2$ at room temperature are reported. The sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of $130^{\circ}C$.

Keywords