CFD Analysis for Concept Design of Air Levitation Transport System

공기부양 이송시스템 개념설계를 위한 전산유동해석

  • Published : 2006.05.01

Abstract

Conveyor-type transporters have been widely used as a typical delivery system of semi-conductor, FPD and other IT-related products. However, as the IT-product is getting larger in size and higher in resolution, several problems are caused by mechanical contacts between the transporter and target object. In this context, recently, lots of efforts are being devoted for development of various contact-free handling systems to get rid of deffets and oil contaminations. The objectives of this paper are to characterize suspension mechanisms and to investigate air flow effects on air levitation transport system. For this purpose, a series of CFD analyses were carried out and the simulation data showed a good agreement with the corresponding experimental ones. It is anticipated that the promising result can be used as a basis for concept design of the transport system.

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