Analysis of Excimer laser ablation via FDTD method

FDTD방법을 이용한 엑시머 레이저 어블레이션 해석

In this paper, an analytical laser ablation model with Maxwell equation will be addressed by considering relationship between laser ablation and material. The Maxwell equation consists of four equations: two Gauss laws for electric and magnetic fields, Faraday's law, and Ampere's law. This analytical model will be calculated by employing Finite Difference Time Domain (FDTD). This method also makes it possible to simulate the laser beam propagation in a wide range of materials, such as metals, semiconductors, and dielectrics. Therefore, in this study, a numerical model for short pulse laser interaction with materials is developed, focusing on the accurate description of laser beam propagation and ablation process into the material with each pulse.