Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

  • 2006.05a
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  • Pages.223-224
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  • 2006
  • /
  • 2005-8446(pISSN)
Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Micromachining of PZT using Nd:YAG laser

Nd:YAG 레이저를 이용한 PZT의 미세가공

  • Hong J.U. (IT Machinery Research Center, KIMM) ;
  • Lee J.H. (IT Machinery Research Center, KIMM) ;
  • Suh J. (IT Machinery Research Center, KIMM) ;
  • Shin D.S. (IT Machinery Research Center, KIMM)
  • Published : 2006.05.01
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Abstract

In this study, we have investigated the micromachining of PZT to fabricate interdigitated electrodes of electro active material actuator using Nd:YAG laser We have observed groove shapes of PZT with changing beam power, scanning speed, gas, and so on to find optimum conditions of the laser processing for PZT grooves. As a result, this method has been applied to the laser micromachining for grooves in PZT surface, and we could have optimum parameters of Nd:YAG laser Finally it was shown that the laser micromachining of PZT can substitute fer bonding, etching and deposition processes in fabricating electro active material actuator embedded with interdigitated electrodes.

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