Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2006.04a
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- Pages.12-12
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- 2006
Hardness and thermal stability of $c-TiAlN/a-Si_3N_4$ nanoscale multilayered film
결정질-TiAlN/비정질-$Si_3N_4$ 나노 다층막의 경도 및 열적 안정성
Abstract
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