Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2006.04a
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- Pages.25-25
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- 2006
Fabrication of multi-component Zn-In-Sn-O system transparant conductive oxide by RF magnetron co-sputtering
RF 마그네트론 스퍼터링을 이용한 Zn-In-Sn-O 다성분 투명 전극 제작
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