Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)

The Korean Institute of Surface Engineering (한국표면공학회)
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Chemical Source Effect on the Deposition of Diamond-like Carbon Films

Chemical source에 따른 DLC필름의 특성 변화

  • 박세준 (한국과학기술연구원 미래기술연구본부)
  • Published : 2006.04.01
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