Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2007.07a
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- Pages.1321-1322
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- 2007
Improving the etch properties and selectivity of BLT thin film adding $CH_4$ gas in $Ar/Cl_2$ plasma
$Ar/Cl_2$ plasma에서 $CH_4$ 첨가에 따른 BLT 박막의 식각특성 및 선택비 향상
- Kim, Jong-Gyu (School of Electrical and Electronic Engineering, Chung-Ang University) ;
- Kim, Gwan-Ha (School of Electrical and Electronic Engineering, Chung-Ang University) ;
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Kim, Kyoung-Tae
(School of Electrical and Electronic Engineering, Chung-Ang University) ;
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Woo, Jong-Chang
(School of Electrical and Electronic Engineering, Chung-Ang University) ;
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Kim, Chang-Il
(School of Electrical and Electronic Engineering, Chung-Ang University)
- 김종규 (중앙대학교 전자전기공학부) ;
- 김관하 (중앙대학교 전자전기공학부) ;
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김경태
(중앙대학교 전자전기공학부) ;
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우종창
(중앙대학교 전자전기공학부) ;
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김창일
(중앙대학교 전자전기공학부)
- Published : 2007.07.18
Abstract
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