Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characteristics of Piezoelectric Microspeakers according to the Material Properties

물성변화에 따른 압전형 마이크로스피커의 특성

  • Jeong, Kyong-Shik (Department of Mechanical Engineering/Research Center for Sustainable Eco-Devices and Materials(RIC-ReSEM), Chungju National University) ;
  • Park, Jong-Sun (Department of Mechanical Engineering/Research Center for Sustainable Eco-Devices and Materials(RIC-ReSEM), Chungju National University) ;
  • Cho, Hee-Chan (Department of Mechanical Engineering/Research Center for Sustainable Eco-Devices and Materials(RIC-ReSEM), Chungju National University) ;
  • Yi, Seung-Hwan (Department of Mechanical Engineering/Research Center for Sustainable Eco-Devices and Materials(RIC-ReSEM), Chungju National University)
  • 정경식 (국립충주대학교 기계공학과/친환경 에너지 부품소재센터) ;
  • 박종선 (국립충주대학교 기계공학과/친환경 에너지 부품소재센터) ;
  • 조희찬 (국립충주대학교 기계공학과/친환경 에너지 부품소재센터) ;
  • 이승환 (국립충주대학교 기계공학과/친환경 에너지 부품소재센터)
  • Published : 2007.11.01
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Abstract

This paper reports the characteristics of piezoelectric microspeakers that are audible in open air with high quality piezoelectric AlN thin film according to the materials properties. When we use a tensile-stressed silicon nitride diaphragm as a supporting layer, the Sound Pressure Level (SPL) is relatively small. However, the SPL of the fabricated microspeakers that have compressive-stressed composite diaphragm show higher output pressure than those of tensile-stressed diaphragm. It produces more than 60dB from 100Hz to 15kHz and the highest SPL is about 100dB at 9.3kHz with 20 Vpeak-to-peak sinusoidal input biases and at 10 mm distances from the fabricated microspeakers to the reference microphone.

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