Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.11a
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- Pages.89-90
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- 2007
Effects $H_2$ carrier gas on the mechanical properties of poly 3C-SiC thin films
$H_2$ 캐리어가스가 다결정 3C-SiC 박막의 기계적 특성에 미치는 영향
- Han, Ki-Bong (University of Ulsan) ;
- Chung, Gwiy-Sang (University of Ulsan) ;
- Hong, Hoang Sy (University of Ulsan)
- Published : 2007.11.01
Abstract
This paper presents the mechanical properties of 3C-SiC thin film according to 0, 7, and 10% carrier gas