Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.11a
- /
- Pages.299-299
- /
- 2007
Omni-directional piezoelectric actuator using mixed mode
혼합 모드를 이용한 전방향성 초음파 액추에이터
-
Jung, Woo-Suk
(KIST, Thin Film Material Research Center)
;
-
Kang, Jhong-Yun
(KIST, Thin Film Material Research Center)
;
- Song, Hyun-Chul (KIST, Thin Film Material Research Center) ;
-
Yoon, Seok-Jin
(KIST, Thin Film Material Research Center)
-
정우석
(한국과학기술연구원, 박막재료연구센터)
;
-
강종윤
(한국과학기술연구원, 박막재료연구센터)
;
- 송현철 (한국과학기술연구원, 박막재료연구센터) ;
-
윤석진
(한국과학기술연구원, 박막재료연구센터)
- Published : 2007.11.01
Abstract
This paper presents an omni-directional piezoelectric actuator which utilizes only one actuator. The actuator has a simple structure of cone type consists of two piezoelectric ceramics of ring type and electrodes divided four segments and a stainless steel body. To find the optimal operating condition of the actuator, the frequency characteristics of the actuator are analyzed by ATILA, FEM and measured by Impedance Analyzer. We have also developed a stage using the omni-directional actuator and an actuator driver circuit to create four sinusoidal waves with a variable frequency and phase difference.