Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.11a
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- Pages.347-348
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- 2007
Design and Fabrication of Micro-sensors Using CMOS Technology
CMOS 공정을 이용한 마이크로 센서의 설계 및 제작
- Lee, Sung-Pil (Kyungnam University) ;
- Lee, Ji-Gong (Kyungnam University) ;
- Chang, Choong-Won (Kyungnam University) ;
- Kim, Ju-Nam (Kyungnam University) ;
- Lee, Yong-Jae (Kyungnam University) ;
- Yang, Heung-Yol (Kyungnam University)
- Published : 2007.11.01
Abstract
On-chip micro humidity sensor, using