Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.11a
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- Pages.414-415
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- 2007
Technology to Fabricate PMMA Light Guiding Plate with nano pattern Using Nano Imprinting Technology
나노 임프린팅 기술에 의한 나노패턴을 갖는 PMMA 도광판 제조 기술
- Lee, B.W. (Soonchunhyang University) ;
- Lee, T.S. (Soonchunhyang University) ;
- Lee, C.H. (Soonchunhyang University) ;
- Lee, K.W. (Soonchunhyang University) ;
- Hong, C. (Soonchunhyang University) ;
- Chung, Jae-Hoon (Soonchunhyang University) ;
- Kim, C.K. (Soonchunhyang University)
- 이병욱 (순천향대학교) ;
- 이태성 (순천향대학교) ;
- 이종하 (순천향대학교) ;
- 이근우 (순천향대학교) ;
- 홍진수 (순천향대학교) ;
- 정재훈 (순천향대학교) ;
- 김창교 (순천향대학교)
- Published : 2007.11.01
Abstract
PMMA light guiding plate with nano pattern was fabricated by nano imprinting technology. Silicon mold was fabricated by conventional photolithography. A nickel stamper was fabricated by electroplating process using silicon mold. Nano imprinting was performed on PMMA plate at