Technology to Form Nano-sized Pattern on Light Guiding Plate Using MmSH Injection Molding Method

MmSH 사출성형법을 이용한 도광판용 나노패턴 형성기술 개발

  • Published : 2007.11.01

Abstract

MmSH injection molding method to fabricate light guiding plate with nano-sized pattern was developed. A stamper was fabricated through photolithography, dry etching, and electroplating processes. While the stamper with nano-sized pattern in mold was kept at $180^{\circ}C$ during injection process, that was cooled down to $90^{\circ}C$ quickly after the injection process. The nano-sized pattern on light guiding plate processed by MmSH injection molding method was well transferred from stamper compared to that processed by conventional injection molding process.

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