Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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Fabrication and Evaluation of electron beam tip for field emission

전계방출 방식의 전자빔 팁의 제작 및 평가

  • 김충수 (서울대학교 기계항공공학부) ;
  • 김동환 (서울산업대학교 기계설계학과) ;
  • 박만진 (서울대학교 기계항공공학부) ;
  • 장동영 (서울대학교 산업정보시스템공학과) ;
  • 안성훈 (서울대학교 기계항공공학부) ;
  • 한동철 (서울대학교 기계항공공학부)
  • Published : 2007.05.30
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Abstract

A Nano-tip as a cold field emitter for inducing a field emission current has manufactured in many ways. In the paper, the electrochemical etching method is used. Thus, in order to optimize the final shape as the field emitter, the reliable fabrication system for electrochemical etching was constructed. In addition, the effective parameters such as applied voltage, submerged length, meniscus height, electrolyte concentration and environmental condition(vibration, humidity, cut-off time) have investigated in detail. By controlling the parameters, reliable tungsten tip for field emitter was fabricated. And the fabricated tungsten tip was evaluated optically. Finally, the very sharp apex of the tungsten tip was observed with scanning electron microscope.

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