Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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Reliable design and characterization of MEMS probe tip

신뢰성을 갖는 MEMS 프로브 팁의 설계 및 특성평가

  • 이승훈 (서울대학교 기계항공공학부 대학원) ;
  • 추성일 (한국과학기술연구원 나노바이오연구센터) ;
  • 김진혁 (한국과학기술연구원 나노바이오연구센터) ;
  • 서호원 (한국과학기술연구원 나노바이오연구센터) ;
  • 한동철 (서울대학교 기계항공공학부) ;
  • 문성욱 (한국과학기술연구원 나노바이오연구센터)
  • Published : 2007.05.30
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Abstract

The Probe Card is a test component which is to classify the good semiconductor chips before the packaging. The yield of semiconductor product can be better from analysis of probe test information. Recently the technology of the probe card needs narrow width and large amount of probe tip. In this research, the probe tip based on the MEMS(micro electro mechanical system) technology was designed and fabricated to improve the reliability of the test and to meet 2-dimensional Array of tip. The mechanical and electrical properties of proposed tip were evaluated and it has over 100,000 of repetition times in the condition of 5gf, $20{\mu}m$ Over Drive.

Keywords