한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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- Pages.1677-1679
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- 2007
Thickness-dependent morphology of ZnO films and amorphous ZnO Transparent TFT
- Hsieh, Hsing-Hung (Graduate Institute of Electronics Engineering, Graduate Institute of Electrooptical Engineering, and Department of Electrical Engineering, National Taiwan University) ;
- Wu, Chung-Chih (Graduate Institute of Electronics Engineering, Graduate Institute of Electrooptical Engineering, and Department of Electrical Engineering, National Taiwan University)
- 발행 : 2007.08.27
초록
Thickness dependent morphology of ZnO films was studied, and ZnO can be intentionally grown into amorphous phase by reducing the thickness. The top-gate amorphous ZnO TTFTs with rather high field-effect mobilities and on/off current ratios were effectively fabricated.