Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
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- Pages.68-69
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- 2007
Optical Analysis of p-Type ZnO:Al Thin Films
- Jin, Hu-Jie (School of Electric and Information Engineering Wonkwang Uni.) ;
- So, Byung-Moon (Iksan National Coll.) ;
- Park, Bok-Kee (Howon Coll.) ;
- Park, Choon-Bae (School of Electric and Information Engineering Wonkwang Uni.)
- Published : 2007.06.21
Abstract
We have prepared p-type ZnO:Al films in pure oxygen ambient on n-type Si (100) and homo buffer layers by RF magnetron sputtering system. Hall effect measurement shows that the film annealed at