한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
- /
- Pages.171-171
- /
- 2007
Liquid Delivery MOCVD로 증착된 강유전체 BDT 박막의 피로 특성 향상
Improvement of Fatigue Properties in Ferroelectric Dy-Doped Bismuth Titanate(BDT) Thin Films Deposited by Liquid Delivery MOCVD System
- Kang, Dong-Kyun (Department of Materials Science and Engineering, Korea University) ;
- Park, Won-Tae (Department of Materials Science and Engineering, Korea University) ;
- Kim, Byong-Ho (Department of Materials Science and Engineering, Korea University)
- 발행 : 2007.06.21
초록
Dysprosium-doped bismuth titanate (BDT) thin films were successfully deposited on Pt(111)/Ti/