Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Photo-conductive properties of CdS thin film deposited on glass substrate

글라스 기판위에 증착한 CdS 박막의 광전특성 평가

  • Phuong, Nguyen Mai (Department of Nano Information Systems Engineering, Chungnam National University) ;
  • Hur, Sung-Gi (Department of Nano Information Systems Engineering, Chungnam National University) ;
  • Kim, Eui-Tae (Department of Nano Information Systems Engineering, Chungnam National University) ;
  • Yoon, Soon-Gil (Department of Nano Information Systems Engineering, Chungnam National University)
  • 웬마이프엉 (충남대학교 나노시스템공학과) ;
  • 허성기 (충남대학교 나노시스템공학과) ;
  • 김의태 (충남대학교 나노시스템공학과) ;
  • 윤순길 (충남대학교 나노시스템공학과)
  • Published : 2007.06.21
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Abstract

Photo-conductive properties of CdS films deposited on glass substrates by a reactive sputtering in Ar atmosphere were characterized as a function of working pressure and the film thickness. The XRD measurements of CdS films revealed obvious (002) preferred orientation. In 300nm-thick of films, difference between dark and photo-resistance increases with increasing working pressure within the films. The films at 5 mTorr of working pressure show a dark resistance of approximately $1\;{\times}\;10^6\;{\Omega}/{\square}$ and a photo-resistance of $3\;{\times}\;10^4\;{\Omega}/{\square}$. The decrease dark- and photo-resistance of films as thickness decrease were $1.4\;{\times}\;10^6$ and $3\;{\times}\;10^4\;{\Omega}/{\square}$, respectively. CdS films deposited on glass substrates are considered tobe suitable for photo-conductivity materials in stealth radome applications.

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