한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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- Pages.373-374
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- 2007
$16{\times}16$ 비정질 실리콘 볼로미터 설계 및 제작
Design and Fabrication of the $16{\times}16$ Amorphous Silicon Microbolometer Array
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Kang, Tai-Young
(OCAS Corp.)
;
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Lim, Sung-Soo
(OCAS Corp.)
;
- Kwak, Yong-Seok (OCAS Corp.) ;
- Jang, Won-Soo (OCAS Corp.) ;
- Han, Myung-Soo (Korea Photonics Technology Institute) ;
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Park, Young-Sik
(Korea Photonics Technology Institute)
- 발행 : 2007.06.21
초록
The amorphous silicon microbolometer array has been developed by the MEMS design and fabrication technology. Before the bolometer array for the image sensor being designed, the structure of unit cel I and 16x16 array of it was simulated, designed and fabricated. The properties of bolometer have been measured as such that the TCR and thermal time constant can be achieved -2 %/K and 1.4 msec respectively.