Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2007.11a
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- Pages.44.1-44.1
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- 2007
The Electrical Characteristics of TiO2/Al2O3/TiO2 nano-laminated thin film by Plasma Enhanced Atomic Layer Deposition
- Ju, Dae-Gwon ;
- Jeon, U-Jin (Hynix) ;
- Gang, Sang-Won
- Published : 2007.11.02