Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)

The Korean Institute of Surface Engineering (한국표면공학회)
권호 표지

SIMULATIONS OF A FILM/SUBSTRATE TEMPERATURE ELEVATION DURING A MAGNETRON DEPOSITION

  • Britun, N. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
  • Shin, K.S. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
  • Han, J.G. (Center for Advanced Plasma Surface Technology, SungKyunKwan University)
  • Published : 2007.11.12
Download PDF
⟨ Previous Next ⟩

Abstract

Keywords