Radiation heat exchange 방법을 이용한 금속박막의 열전도도 측정

Thermal conductivity measurement of thin metallic films using radiation heat exchange method

Thermal conductivities of copper thin films on silicon wafer was obtained from temperature distribution on the surface of wafer measured by radiation thermometry, when sample was heated with constant temperature ate the both ends in a vacuum and dissipate heat by radiation heat transfer into an environment.