Proceedings of the SAREK Conference (대한설비공학회:학술대회논문집)

The Society of Air-Conditioning and Refrigerating Engineers of Korea (대한설비공학회)
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Numerical Analysis on Silicon Film Deposition on a Heated Rotating Semiconductor Wafer from Silane Gas

실란가스를 이용한 회전 반도체 웨이퍼로의 실리콘 박막 증착 수치해석

  • Song, Gen-Soo (Aerosol and Contamination Control Labortary, Korea Institute of Industrial Technology) ;
  • Yoo, Kyung-Hoon (Aerosol and Contamination Control Labortary, Korea Institute of Industrial Technology)
  • 송근수 (한국생산기술연구원 에어로졸.오염제어 연구실) ;
  • 유경훈 (한국생산기술연구원 에어로졸.오염제어 연구실)
  • Published : 2007.06.20
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