Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference (한국조명전기설비학회:학술대회논문집)
- 2008.05a
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- Pages.7-9
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- 2008
A study on the Optical Properties of OLED Anode by Chemical Mechanical Polishing
양호한 유기발광소자의 광학적 특성 개선을 위한 Anode 표면특성에 관한 연구
- Lee, Woo-Sun (Chosun University) ;
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Choi, Gwon-Woo
(Chosun University)
;
- Ko, Pil-Ju (Chosun University) ;
- Park, Ju-Sun (Chosun University) ;
- Na, Han-Yong (Chosun University)
- Published : 2008.05.08
Abstract
ITO thin film is generally fabricated by various. methods such as spray, CVD, evaporation, electron gun deposition, direct current electroplating, high frequency sputtering, and reactive DC sputtering. However, some problems such as peaks, bumps, large particles, and pin-holes on the surface of ITO thin film were reported, which caused the destruction of color quality, the reduction of device life time, and short-circuit. Chemical mechanical polishing (CMP) process is one of the suitable solutions which could solve the problems
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