한국광학회:학술대회논문집 (Proceedings of the Optical Society of Korea Conference)

한국광학회 (Optical Society of Korea)
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Characterization of $ZrO_2$ thin films fabricated by glancing angle deposition

  • 발행 : 2008.02.01
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초록

The glancing angle deposition (GLAD) technique was used to fabricate $ZrO_2$ thin films by electron-beam evaporation. The crystal structure, cross-sectional structure, surface morphology and optical properties are characterized by X-ray diffraction meter (XRD, Rigaku, Cu $K{\alpha}$ - radiation), scanning electron microscope (SEM), and spectrophotometer, respectively.

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