Barrier property Enhancement of Plastic Substrates for Flexible Display by Inorganic-organic Hybrid Multilayer

  • Kim, Hyun-Gi (College of Environmental and Applied Chemistry, Reigional Innovation Center for Components and Materials for Information Display) ;
  • Ryu, Hyun-Sun (College of Environmental and Applied Chemistry, Reigional Innovation Center for Components and Materials for Information Display) ;
  • Kim, Sung-Soo (College of Environmental and Applied Chemistry, Reigional Innovation Center for Components and Materials for Information Display)
  • Published : 2008.10.13

Abstract

Inorganic-organic hybrid multilayers were formed on the plastic substrate to enhance the barrier properties of substrate to water vapor and oxygen transport. Plasma pretreatment of substrate with $Ar/O_2$ lead to adhesion improvement and the densification of inorganic layer on the substrates. Combination of $SiO_xN_y$ layer and silanenanoclay composite layer offered quite good barrier properties (WVTR and OTR) to PES substrate.

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