한국정보디스플레이학회:학술대회논문집
- 2008.10a
- /
- Pages.863-866
- /
- 2008
A Compacted In-line Wet Etch/Cleaning System With a Reverse Moving Control System
- Im, Seung-Hyeok (Display, Department of Electronics Engineering, Kyungwon University) ;
-
Cho, Eou-Sik
(Display, Department of Electronics Engineering, Kyungwon University)
;
-
Kwon, Sang-Jik
(Display, Department of Electronics Engineering, Kyungwon University)
- Published : 2008.10.13
Abstract
For the cost reduction in the fabrication of display panels, a reverse moving system was equipped to a compacted in-line wet etch/cleaning system. For the effect of the alternating movement of substrate on the wet etch process, ITO layers were etched in various moving modes of substrates and the results were compared and analyzed.
Keywords