한국정보디스플레이학회:학술대회논문집
- 2008.10a
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- Pages.903-906
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- 2008
SELAX Technology for Poly-Si TFTs Integrated with Amorphous-Si TFTs
- Kaitoh, Takuo (Hitachi Displays, Ltd.) ;
- Miyazawa, Toshio (Hitachi Displays, Ltd.) ;
- Miyake, Hidekazu (Hitachi Displays, Ltd.) ;
- Noda, Takeshi (Hitachi Displays, Ltd.) ;
- Sakai, Takeshi (Hitachi Displays, Ltd.) ;
- Owaku, Yoshiharu (Hitachi Displays, Ltd.) ;
- Saitoh, Terunori (Hitachi Displays, Ltd.)
- Published : 2008.10.13
Abstract
We developed the advanced LTPS (A-LTPS) manufacturing process. The a-Si TFT process was combined with selectively enlarging laser crystallization (SELAX) technology to improve the carrier mobility in the region where the peripheral circuits are to be fabricated. A 2.4-inch IPS-pro LCD panel for personal digital assistant use was successfully fabricated using the developed technology.