Two-shot SLS of Si film for manufacturing of AMOLED displays

  • Limanov, A.B. (Department of Applied Physics and Applied Mathematics, Columbia University) ;
  • Chung, U.J. (Department of Applied Physics and Applied Mathematics, Columbia University) ;
  • Van Der Wilt, P.C. (Department of Applied Physics and Applied Mathematics, Columbia University) ;
  • Chitu, A.M. (Department of Applied Physics and Applied Mathematics, Columbia University) ;
  • Choi, J.B. (LCD Business, Samsung Electronics Co) ;
  • Turk, B.A. (Coherent, Inc) ;
  • Im, James S. (Department of Applied Physics and Applied Mathematics, Columbia University)
  • Published : 2008.10.13

Abstract

The two-shot SLS method has recently been successfully implemented in volume manufacturing of advanced LTPS-based LCDs. In this presentation, we discuss how the approach is also well suited for being implemented in high-throughput and high-yield manufacturing of large AMOLED displays on large glass substrates.

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