Research of the TFT-LCD Photosensitive Resist Thickness

  • Published : 2008.10.13

Abstract

We find some array mura are caused by S/D bridge or channel open in 4 mask process. The gray tone PR thickness non-uniformity is the main reason of these defects. By the adjustment of exposure and dry etch parameters, S/D bridge and channel open ratio drops by 10.87%.

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