한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Control of secondary electron emission coefficient with microstructural change of polycrystalline MgO films

  • Yu, Hak-Ki (Dept. of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH)) ;
  • Lee, Jong-Lam (Dept. of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH)) ;
  • Park, Eung-Chul (LG Electronics Inc.) ;
  • Kim, Jae-Sung (LG Electronics Inc.) ;
  • Ryu, Jae-Hwa (LG Electronics Inc.)
  • Published : 2008.10.13
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Abstract

Micro crystal structure of polycrystalline MgO film is controlled by adjusting the energy of particles arrived at the substrate during deposition. The change of crystal structure affects on the total area of (200) surface where the oxygen vacancies are formed easily, resulting in the change of secondary electron emission (SEE) coefficient($\gamma$).

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