한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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- Pages.1466-1469
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- 2008
Top gate ZnO-TFT driving AM-OLED fabricated on a plastic substrate
- Hwang, Chi-Sun (Transparent Electronics Team, ETRI) ;
- Kopark, Sang-Hee (Transparent Electronics Team, ETRI) ;
- Byun, Chun-Won (Transparent Electronics Team, ETRI) ;
- Ryu, Min-Ki (Transparent Electronics Team, ETRI) ;
- Yang, Shin-Hyuk (Transparent Electronics Team, ETRI) ;
- Lee, Jeong-Ik (Transparent Electronics Team, ETRI) ;
- Chung, Sung-Mook (Transparent Electronics Team, ETRI) ;
- Kim, Gi-Heon (Transparent Electronics Team, ETRI) ;
- Kang, Seung-Youl (Transparent Electronics Team, ETRI) ;
- Chu, Hye-Yong (Transparent Electronics Team, ETRI)
- 발행 : 2008.10.13
초록
We have fabricated 2.5 inch QQCIF AM-OLED panel driven by ZnO-TFT on a plastic substrate for the first time. The number of photo mask for the whole panel process was 5 and the TFT structure was top gate with active protection layer as a first gate insulator. Optimizing the process for the substrate buffer layer, active layer, ZnO protection layer, and gate insulator was key factor to achieve the TFT performance enough to drive OLED. The ZnO TFT has mobility of
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