Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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properties of Metal/$ZrTiO_4$/Metal Capacitors for Microwave Applications

고주파 적용을 위한 금속/$ZrTiO_4$/금속 캐피시터 특성

  • 박창순 (군산대학교 신소재공학과) ;
  • 선호정 (군산대학교 신소재공학과)
  • Published : 2008.11.06
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Abstract

There are fast growing demands for new dielectric materials for passive capacitors of RF-ICs and other wireless applications. One of the bulk microwave dielectric materials which have superior properties is $ZrTiO_4$ due to its large dielectric constant and high quality factor. Therefore, $ZrTiO_4$ is worth studying as a form of thin film to be applied for passive capacitors of integrated circuits. In this study, we fabricated metal-insulator-metal type capacitors with $ZrTiO_4$ dielectric thin film, and evaluated their capacitor properties.

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