Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.11a
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- Pages.260-261
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- 2008
Effect of annealing on the properties of zinc doped indium oxide(IZO) films
후열처리에 따른 Indium Zinc Oxide(IZO) 박막의 특성변화
- Kim, Dae-Hyun (Kyungwon University) ;
- Kim, Sang-Mo (Kyungwon University) ;
- Choi, Hyung-Wook (Kyungwon University) ;
- Kim, Kyung-Hwan (Kyungwon University) ;
- Rim, You-Seong (Kyungwon University)
- Published : 2008.11.06
Abstract
In this study, we investigated the properties of Indium Zinc Oxide (IZO) films prepared in facing targets sputtering (FTS) system at room temperature as function of oxygen contents. As as-deposited films were rapidly thermal annealing on air atmosphere of