Design of polycrystalline 3C-SiC micro beam resonators with corrugation

주름진 다결정 3C-SiC 마이크로-빔 공진기의 설계

This work has suggested corrugation beam as a new structure for mechanical resonators. Micro beam resonators based on 3C-SiC films which have two side corrugations along the length of beams were simulated by finite-element modeling and compared to a flat rectangular beam with the same dimension. With the dimension of $36\times12\times0.5{\mu}m^3$, the flat cantilever has resonant frequency of 746 kHz. Meanwhile, this frequency reaches 1.252 MHz with the corrugated cantilever which has the same dimension with flat type but corrugation width of $6{\mu}m$ and depth of $0.4{\mu}m$. It is expected that mechanical resonators with corrugations will be very helpful for the research of sensing devices with high-resolution, high-performance oscillators and filters in wireless communications as well as measurement in basic physics.