Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.06a
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- Pages.403-404
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- 2008
Properties of ITO thin film's aging change prepared on the various substrate
다양한 기판에 제작한 ITO 박막의 실온 특성 변화
- Kim, Sang-Mo (Shinsung College) ;
- Rim, You-Seung (Shinsung College) ;
- Son, In-Hwan (Kyungwon Univ.) ;
- Kim, Kyung-Hwan (Shinsung College)
- Published : 2008.06.19
Abstract
In this study, we prepared ITO thin film on glass, polycarbonate (PC) and polyethersulfone (PES) substrate in Facing Targets sputtering (FTS) system. Properties of as-deposited thin films's aging change were investigated as a function of time placed in the air. The electrical and optical properties of as-deposited thin films were employed by a four point probe and an UV/VIS spectrometer, an X-ray diffractometer (XRD), a Field Emission Scanning Electron Microscope(FESEM) and a Hall Effect measurement. As a result, as time went by, transmittance of all films did not change but resistivity of films was decreasing.