한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 춘계학술대회 논문집 센서 박막재료연구회 및 광주 전남지부
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- Pages.41-41
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- 2008
Fabrication of Al-doped ZnO Thin Films by Vertical In-line DC Magnetron Sputtering
- Heo, Gi-Seok (Nanoelectronics Team, Gwangju Research Center, Korea Institute of Industrial Technology) ;
- Kim, Tae-Won (Nanoelectronics Team, Gwangju Research Center, Korea Institute of Industrial Technology) ;
- Lee, Jong-Ho (Nanoelectronics Team, Gwangju Research Center, Korea Institute of Industrial Technology)
- 발행 : 2008.04.17
초록
Al-doped ZnO (AZO) thin films have been fabricated by vertical in-line dc magnetron sputtering for transparent conducting oxides (TCOs) applications. The effects of substrate temperature and dc power on the characteristics of AZO thin films are investigated and also optimized the process conditions to get the best electrical and optical properties. The fabricated thin films show a good electrical and optical uniformity within