한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2008년도 춘계학술대회 논문집
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- Pages.835-836
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- 2008
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- 2005-8446(pISSN)
변위 증폭 메커니즘을 이용한 scanning probe microscopy용 PZT구동 2축 나노 스캐너 설계
Design of 2-D nano scanner with displacement amplifier mechanism which is driven by PZT for application to scanning probe microscopy (SPM)
- 발행 : 2008.06.11