Proceedings of the Korean Society for Technology of Plasticity Conference (한국소성가공학회:학술대회논문집)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
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Trend of recent research and applications on Nanoimprint Lithography

나노임프린트 리소그래피 기술의 연구 및 응용 동향

  • 나도백 (한국과학기술정보연구원 정보분석센터) ;
  • 박장선 (한국과학기술정보연구원 ReSEAT 프로그램)
  • Published : 2008.10.09
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Abstract

With intensive research and development to mass particular nanostructure of 10nm, Nanoimprint lithography will soon be put to practical use. This paper reviews latest research and application trend and also covers technical articles about Nanoimprint lithography technology Published since 1998, including statistical analysis of collected data(Web of Science DB) and related technical trend.

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