Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2008.11a
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- Pages.83-85
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- 2008
Microstructure and Mechanical Properties of Ti-Si-C-N Coatings Synthesized by Plasma-Enhanced Chemical Vapor Deposition
PECVD 로 합성된 Ti-Si-C-N 코팅막의 미세구조 및 기계적 성질
Abstract
4성분계 Ti-Si-C-N 코팅막은
Keywords