Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2008.11a
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- Pages.127-127
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- 2008
Fabrication of high ordered nano-sphere array on curved substrate by nanoimprint lithography
- Published : 2008.11.19
Abstract
The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. The polymer replica was coated with silcon dioxide layer and self-assembled monolayer. Using UV nanoimprint lithography with the template, highly ordered nano-sphere array patterns were clearly fabricated on curved substrate.
Keywords