한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)

한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지

Fabrication of high ordered nano-sphere array on curved substrate by nanoimprint lithography

  • 홍성훈 (고려대학교, 신소재공학과) ;
  • 배병주 (고려대학교, 신소재공학과) ;
  • 이헌 (고려대학교, 신소재공학과)
  • 발행 : 2008.11.19
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초록

The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. The polymer replica was coated with silcon dioxide layer and self-assembled monolayer. Using UV nanoimprint lithography with the template, highly ordered nano-sphere array patterns were clearly fabricated on curved substrate.

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