In-situ monitoring technique for deposition process of CdS buffer layer for CIGS thin film solar cells

CIGS 박막 태양전지용 CdS 버퍼층 제조 공정의 in-situ 모니터링 기술

An in-situ monitoring technique for deposition process of CdS buffer layer was developed in this work. A quartz crystal microbalance (QCM) was used to measure the frequency change during the CdS deposition process and the relation ship between frequency change and film thickness and optical transmittance was investigated. The film thickness shows a linear relationship with frequency change, demonstrating that frequency change measured by QCM can be used a in-situ monitoring tool for CdS deposition process.