The Hybrid Control System for the Vibration Isolation and the Transient Response Reduction of precision Equipment

정밀장비의 방진 및 과도응답 제어를 위한 하이브리드 방진시스템

It is very important to control the vibration transmitted from external utilities and the transient response due to the internal sources for the precision equipment, which is very sensitive to the vibration environment. The anti-vibration tables that use air springs have been widely used due to their excellent isolation performance, but the systems with high flexibility have the critical problem of large transient response by the impulsive force of the moving mass in operation of the equipment. In this paper, the hybrid vibration control system is proposed, which is combined the air springs with the semi-active MR dampers in order to satisfy the performances of isolation and vibration reduction simutaneously.