한국소음진동공학회:학술대회논문집 (Proceedings of the Korean Society for Noise and Vibration Engineering Conference)
- 한국소음진동공학회 2009년도 추계학술대회 논문집
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- Pages.324-325
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- 2009
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- 1598-2548(pISSN)
XY-axis VCM fine stage 의 진동 측정을 이용한 AFM 의 분해능 향상
Resolution Improvement of AFM using the mechanical vibration measurement of an XY-axis VCM fine stage
- Kim, Chul-Soo (GIST) ;
- Kim, Yong-Dae (LG Electronics Co.) ;
- Jeong, Jong-Kyu (GIST) ;
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Yum, Woo-Sub
(GIST)
;
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Park, Kyi-Hwan
(GIST)
- 발행 : 2009.10.29