Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2009.10a
- /
- Pages.376-380
- /
- 2009
- /
- 1598-2548(pISSN)
Signal Processing of Capacitive Load and Gap Measurement with High Precision Using Surface Acoustic Wave Device
표면 탄성파 장치를 이용한 용량성 부하의 신호처리 및 이를 이용한 초정밀 간극 측정
- Kim, Jae-Geun ;
- Lee, Taek-Joo ;
- Lim, Soo-Cheol ;
-
Park, No-Cheol
;
-
Park, Young-Pil
;
- Park, Kyoung-Soo
- 김재근 (연세대학교 기계공학과 대학원) ;
- 이택주 (아이티에프(주)) ;
- 임수철 (삼성전기(주)) ;
-
박노철
(연세대학교 기계공학과)
;
-
박영필
(연세대학교 기계공학과)
;
- 박경수 (연세대학교 기계공학과)
- Published : 2009.10.29
Abstract
Surface acoustic wave (SAW) device is widely used as a bandpass filter, a chemical or physical sensor, and an actuator. In this paper, we propose the capacitive gap measurement system with high precision through the signal processing using SAW device. The research process is mainly composed of theoretical part and experimental part. In theoretical part, equivalent circuit model was used to simulate the SAW response by the change of capacitance. In experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance. After that, gap adjustment system was made physically and the SAW response by the change of gap which caused the capacitance change was measured. And resolution and stroke was decided comparing the signal change and basic measurement noise level.