Design and Analysis of Ultrasonic Vibrator for Conformal Coating in LED Packaging

LED 공정의 균일 코팅을 위한 초음파 진동자 설계 및 해석

This paper presents design and analysis of ultrasonic vibrator featuring the piezoelectric actuator. After describing a geometric configuration of the proposed vibrator, an analytical model of the ultrasonic vibrator is formulated by adopting liquid film pattern theory and wave theory. The dynamic analysis and geometric optimization are then undertaken using a software ANSYS. The optimization is performed by taking the amplitude of the tip displacement as an objective function. The fluid flow characteristics of the proposed vibrator are analyzed by taking three different fluids: water, silicon oil and ethylene-glycol. This is achieved using a software FLUENT.